液体静压转台HBRT-360 Hydrostatic Rotary Table

HBRT-360 液体静压转台采用高刚度结构设计，面向晶圆减薄、超精密加工与测量等场景，具备高轴向承载力和良好热稳定性，适用于需要高承载、高刚度和高精度旋转定位的装备系统。HBRT-360 is designed for wafer thinning, ultra-precision machining and measurement, with high axial load capacity and thermal stability for systems requiring high load, rigidity and precision rotary positioning.

应用Applications

晶圆减薄、超精密加工Wafer thinning and ultra-precision machining

特点Features

• 高承载力、高刚度、高精度 • 层流节流器 • 轴向自调节轴承结构 • 电机水冷 • 带速度反馈编码器 • 非接触式密封• High load capacity, rigidity and precision • Laminar-flow restrictor • Self-adjusting axial bearing • Water-cooled motor • Speed feedback encoder • Non-contact seal