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液体静压主轴50K Hydrostatic Spindle for Grinding

50K 液体静压主轴采用 9MPa 供油压力，具有高承载力和刚度，同时具有亚微米级运动误差，电机定子壳体集成水套，可带走多余热量。50K液体静压主轴兼具了高速度、高精度和高刚度，可用于高速精密磨削、铣削和飞切等场合。The 50K hydrostatic spindle uses 9MPa oil supply pressure, offering high load capacity, rigidity and sub-micron motion accuracy with an integrated cooling jacket. It combines high speed, high accuracy and high rigidity for high-speed precision grinding, milling and fly cutting.

应用Applications

高速磨削、高速铣削High-speed grinding and milling

特点Features

• 高速、高刚度、高精度 • 层流节流器 • 轴向自调节轴承结构 • 电机水冷 • 带速度反馈编码器 • 非接触式密封• High speed, rigidity and precision • Laminar-flow restrictor • Self-adjusting axial bearing • Water-cooled motor • Speed feedback encoder • Non-contact seal

液体静压转台HBRT-360 Hydrostatic Rotary Table

HBRT-360 液体静压转台采用高刚度结构设计，面向晶圆减薄、超精密加工与测量等场景，具备高轴向承载力和良好热稳定性，适用于需要高承载、高刚度和高精度旋转定位的装备系统。HBRT-360 is designed for wafer thinning, ultra-precision machining and measurement, with high axial load capacity and thermal stability for systems requiring high load, rigidity and precision rotary positioning.

应用Applications

晶圆减薄、超精密加工Wafer thinning and ultra-precision machining

特点Features

• 高承载力、高刚度、高精度 • 层流节流器 • 轴向自调节轴承结构 • 电机水冷 • 带速度反馈编码器 • 非接触式密封• High load capacity, rigidity and precision • Laminar-flow restrictor • Self-adjusting axial bearing • Water-cooled motor • Speed feedback encoder • Non-contact seal

液体静压导轨Hydrostatic Linear Guideway

液体静压直线导轨承载能力强，具有较高的直线度和定位精度，是超精密机床的关键部件，适用于精密自由曲面加工、半导体材料加工、机床导轨升级和精密检测等领域。The hydrostatic linear guideway provides high load capacity, straightness and positioning accuracy for ultra-precision machine tools, suitable for freeform machining, semiconductor material processing, guideway upgrades and precision inspection.

气体静压转台Aerostatic Rotary Table

气体静压转台采用高精度气体静压轴承技术，通过洁净压缩空气在转动部件与固定部件之间形成稳定的气膜，实现非接触式旋转运动。 转台摩擦阻力小，旋转精度高，运动平稳，无机械磨损，适用于高精密检测、精密加工及超精密制造。Clean compressed air forms a stable film between the rotating and stationary components of the high-precision aerostatic bearing, allowing the table to rotate without contact. Low friction, accurate and smooth rotation, and the absence of mechanical wear make the table suitable for precision inspection, precision machining and ultra-precision manufacturing.

应用Applications

精密测量、超精密加工、精密装配及高精度旋转定位。Precision measurement, ultra-precision machining, precision assembly and rotary positioning.

特点Features

• 非接触式气膜支撑结构 • 高旋转精度与运动平稳性 • 无机械接触，磨损小、寿命长 • 低振动、低噪声 • 高精度旋转定位 • 适用于超精密加工与检测• Non-contact air-film support • Accurate, smooth rotation • Low wear and long life without mechanical contact • Low vibration and noise • High-precision rotary positioning • For ultra-precision machining and inspection