液体静压导轨Hydrostatic Linear Guideway
液体静压直线导轨承载能力强，具有较高的直线度和定位精度，是超精密机床的关键部件，适用于精密自由曲面加工、半导体材料加工、机床导轨升级和精密检测等领域。The hydrostatic linear guideway provides high load capacity, straightness and positioning accuracy for ultra-precision machine tools, suitable for freeform machining, semiconductor material processing, guideway upgrades and precision inspection.
导轨采用直线电机驱动，搭配伺服恒压液压站以适应不同承载需求。油膜悬浮降低摩擦，配备带信号输出的气动刹车锁紧机构，也可选装在位油压刹车锁紧机构。A linear motor drives the guideway. A servo-controlled, constant-pressure hydraulic station accommodates different loads. The oil film minimizes friction. The pneumatic brake provides a status signal; a hydraulic locking brake is optional.
参数Specifications
- 行程Stroke
- 350 mm350 mm
- 定位精度Positioning accuracy
- ±0.1 μm±0.1 μm
- 重复定位精度Repeatability
- <0.1 μm<0.1 μm
- 直线度Straightness
- 0.3 μm / 300 mm0.3 μm / 300 mm