液体静压转台在晶圆减薄中的应用Hydrostatic rotary table in wafer thinning

应用介绍Overview

超高回转精度与低扰动特性，可满足晶圆减薄、精密研磨及半导体制造过程中的稳定支撑需求。Ultra-high rotation accuracy and low disturbance for wafer thinning, precision grinding and semiconductor manufacturing.